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| www..com Product Specification GM-1000 "Precision, high-speed inspection of glass masters supports our yield management initiative and greatly improves customer satisfaction." Glass Master Inspection Glass masters are critical components used in the manufacture of increasingly complex electronic and semiconductor devices. The cost of low yields and defects in glass/quartz/film glassmasks can be very high -- not only in terms of dollars but also in reputation. To avoid the possibility of shipping defective glass or artwork masters, manufacturers are now relying upon automated optical inspection systems to increase their productivity and improve outgoing quality. Robust Operation Sophisticated defect detection algorithms in the operating software automatically detect and adapt to non-critical pattern irregularities, thereby reducing false rejects. Turn-Key Ready The GM-1000 comes ready for integration into any manufacturing facility as a stand-alone process inspection module. Highlights Automatic defect detection ... detects yield-limiting excesses, voids and debris on glass masters High throughput ... less than 2 minutes for a 234 sq. cm glass master @ 3.8 micron Flexible ... inspection of glass masters up to 305 mm x 406 mm Versatile fixturing ... universal adaptor with micro-alignment tools GM-1000 MIDAS' GM-1000 The GM-1000 AOI process module inspects glass masters with resolution down to 3.8 micron. This provides glass master manufacturers with the immediate feedback necessary to refine their fabrication process and eliminate defect-causing phenomenon. The GM-1000 performs fast, accurate and repeatable glass master inspection. The system provides highly efficient Pass/Fail decisions while logging valuable information for process and quality control. Yield-limiting defects such as particulate, etching discrepancies, and debris are readily exposed, logged, and optionally presented to an operator for review. Glass Master Calibration Standard High precision ... defect detection down to 7.6 micron, line and space widths down to 30 micron Robust ... feature-based variable tolerancing, adaptive defect analysis, and dual thresholding for low false rejects (see detailed product specifications on backside) Yield Management in Glass Master Manufacturing Defective Parts Shipped 100% 20% 15% 10% 5% 0% Inspection Accuracy 90% 80% 70% 60% Human GM-1000 Human GM-1000 Preliminary Data www..com GM-1000 Inspection Application Part Size Active Inspection Area Minimum Defect Size Inspection Rate Preliminary Data System Specifications Glass master inspection, emulsion or chrome on glass 381mm x 483mm (contact factory for other sizes) 305mm x 406mm (contact factory for other sizes) 12.5, 7.6 microns (0.25, 0.15 mil.) (contact factory for other sizes) 610 sq. mm/sec (contact factory for part-specific inspection rates) Pattern or spacing violations Contamination/debris Opens, neck-downs, and pinholes Pattern misregistration Defects Detected Inspection References Operation Defect Review Template creation from a "Golden Sample" or Gerber 274X CAD-based template using optional CAD2MIDAS software Defect verification/repair video microscope for on-line verification or repair Operation Defect viewed by Stop and Stare camera Measurement Defect Data Storage Template Storage Part Setup Time Feature size and location, and emulsion/chrome density ASCII delimited files for off-line use (SPC, Reporting,etc.) Networked server (NET2HOSTTM), hard disk and/or vision processor RAM 3 minutes for 232 cm2 (36 in.2 ), norm (depends on size and source of inspection template) Windows 2000 ProfessionalTM - based on NT Two dedicated displays: 1. Graphical process feedback, operator input and machine status feedback 2. Live video microscope for defect review/repair Operator: 3 hours, norm Setup technician: 3 days, norm Operator Interface Training Time Missing conductor shown in red Options Software CAD2MIDASTM - for creating inspection templates based on Gerber 274X with optional SmartTemplatesTM ATG - automatic template generation package for creating highly robust inspection templates with variable sensitivity for ultra-low false calls. Universal tooling plate included. Available options include custom tooling designs, automatic theta alignment, defect mapping. External UPS available. Panel Fixturing Power Fault Protection Electro-Mechanical Dimensions Weight Electrical Safety Certifications 97cm W x 117cm D x 183cm H (38"W x 46"D x 72"H) Electro/Mechanical 231 kg (510 lbs) 110/220 VAC 7 amp (10 amp max) Semi-S2 compliant CE, UL Approved US Headquarters 25 Commercial Drive Wrentham, MA 02093 www.midasvision.com Tel: (508) 384-9600 Fax: (508) 384-8183 Email: sales@midasvision.com Specifications are subject to change without notice. GM-1000 is a trademark of MIDAS Vision Systems, Inc. All rights reserved c 2001. 71201 |
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